Title :
WCDM2 — Wafer-level charged device model testing with high repeatability
Author :
Jack, Nathan ; Maloney, Timothy J. ; Chou, Bruce ; Rosenbaum, Elyse
Author_Institution :
Dept. of Electr. & Comput. Eng., Univ. of Illinois at Urbana-Champaign, Urbana, IL, USA
Abstract :
CDM-like unipolar pulses are generated at the wafer level with excellent repeatability and linearity. Pulse width and rise time resemble that of FICDM testers. In-situ pre- and post-stress curve tracing reveals the current failure threshold for the device under test.
Keywords :
integrated circuit modelling; integrated circuit testing; wafer level packaging; FICDM tester; WCDM; high repeatability; unipolar pulse; wafer-level charged device model testing; Calibration; Current measurement; Discharges; Probes; Resistors; Stripline; Voltage measurement;
Conference_Titel :
Reliability Physics Symposium (IRPS), 2011 IEEE International
Conference_Location :
Monterey, CA
Print_ISBN :
978-1-4244-9113-1
Electronic_ISBN :
1541-7026
DOI :
10.1109/IRPS.2011.5784509
