Title :
Current - voltage properties of piezoelectric thin film ZnO in a micromechanical force sensor
Author :
Yuan, W. ; Smits, J.G. ; Dominguez, P. ; Cantor, C.R. ; Smith, C.L.
Author_Institution :
Dept. of Electr. & Comput. Eng., Boston Univ., MA, USA
Abstract :
A piezoelectric thin film of ZnO was investigated as the active piezoelectric material for a novel force sensor in DNA sequencing. Current-voltage measurements (I-V measurements) were carried out for the electrical characterization. It was found that the I-V curves are not only nonlinear, they are also irreversible and dependent on the electrical history. A model that explains the observed phenomena qualitatively is presented
Keywords :
DNA; II-VI semiconductors; biological techniques; electric sensing devices; force sensors; micromechanical devices; piezoelectric devices; piezoelectric materials; piezoelectric thin films; semiconductor thin films; zinc compounds; DNA sequencing; I-V measurements; ZnO; active piezoelectric material; current-voltage properties; electrical characterization; electrical history; micromechanical force sensor; model; piezoelectric thin film; Chromium; Current measurement; DNA; Force sensors; Immune system; Micromechanical devices; Piezoelectric films; Substrates; Voltage; Zinc oxide;
Conference_Titel :
Ultrasonics Symposium, 1998. Proceedings., 1998 IEEE
Conference_Location :
Sendai
Print_ISBN :
0-7803-4095-7
DOI :
10.1109/ULTSYM.1998.762220
