• DocumentCode
    3380376
  • Title

    A Reusable In-Plane Polymer Integrated Microfluidic Interconnect

  • Author

    Lo, Ronalee ; Meng, Ellis

  • Author_Institution
    Univ. of Southern California, Los Angeles
  • fYear
    2007
  • fDate
    10-14 June 2007
  • Firstpage
    2067
  • Lastpage
    2070
  • Abstract
    A novel reusable, in-plane polymer interconnect directly integrated into a microfluidic system is demonstrated. This approach features plug-and-play style connections to microfluidic networks in which commercially available non-coring syringe needles are simply inserted through pre-defined polydimethylsiloxane (PDMS) septums to form rapid, on-demand connections to microchannels. These septums are mechanically anchored by one layer of SU-8 that also forms the microchannels. Interconnect design, fabrication, theoretical analysis, and experimental results (pull-out force and leakage) are presented.
  • Keywords
    integrated circuit interconnections; integrated circuit packaging; microfluidics; polymers; PDMS septum; in-plane polymer interconnect; integrated microfluidic interconnect design; microchannels; microfluidic networks; microfluidic packaging; noncoring syringe needles; plug-and-play style connections; polydimethylsiloxane septums; standard MEMS process; Biosensors; Electrochemical processes; Electrodes; Etching; Fabrication; Microchannel; Microfluidics; Needles; Packaging; Polymers; microfluidic interconnects; microfluidic packaging; septum;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007. International
  • Conference_Location
    Lyon
  • Print_ISBN
    1-4244-0842-3
  • Electronic_ISBN
    1-4244-0842-3
  • Type

    conf

  • DOI
    10.1109/SENSOR.2007.4300571
  • Filename
    4300571