DocumentCode :
3380376
Title :
A Reusable In-Plane Polymer Integrated Microfluidic Interconnect
Author :
Lo, Ronalee ; Meng, Ellis
Author_Institution :
Univ. of Southern California, Los Angeles
fYear :
2007
fDate :
10-14 June 2007
Firstpage :
2067
Lastpage :
2070
Abstract :
A novel reusable, in-plane polymer interconnect directly integrated into a microfluidic system is demonstrated. This approach features plug-and-play style connections to microfluidic networks in which commercially available non-coring syringe needles are simply inserted through pre-defined polydimethylsiloxane (PDMS) septums to form rapid, on-demand connections to microchannels. These septums are mechanically anchored by one layer of SU-8 that also forms the microchannels. Interconnect design, fabrication, theoretical analysis, and experimental results (pull-out force and leakage) are presented.
Keywords :
integrated circuit interconnections; integrated circuit packaging; microfluidics; polymers; PDMS septum; in-plane polymer interconnect; integrated microfluidic interconnect design; microchannels; microfluidic networks; microfluidic packaging; noncoring syringe needles; plug-and-play style connections; polydimethylsiloxane septums; standard MEMS process; Biosensors; Electrochemical processes; Electrodes; Etching; Fabrication; Microchannel; Microfluidics; Needles; Packaging; Polymers; microfluidic interconnects; microfluidic packaging; septum;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007. International
Conference_Location :
Lyon
Print_ISBN :
1-4244-0842-3
Electronic_ISBN :
1-4244-0842-3
Type :
conf
DOI :
10.1109/SENSOR.2007.4300571
Filename :
4300571
Link To Document :
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