Title :
A micro ultrasonic motor fabricated by hydrothermal method (1.4 mm in diameter and 5 mm in length stator transducer)
Author :
Morita, Takeshi ; Kurosawa, Minoru Kuribayashi ; Higuchi, Toshiro
Author_Institution :
Dept. of Precision Machinery Eng., Tokyo Univ., Japan
Abstract :
We succeeded in operating a micro ultrasonic motor whose cylindrical stator transducer was 1.4 [mm] in diameter and 5.0 [mm] long. A PZT thin film was deposited on the side wall of the stator transducer by improved hydrothermal method. This motor may be one of the smallest ultrasonic motors at this stage. The starting torque was 0.67 [μNm] with the conditions of 5.3 [mN] pre-load and 20 [Vp-p] input voltage. With the same conditions, maximum revolution speed was 680 [rpm]
Keywords :
lead compounds; materials preparation; micromotors; piezoceramics; piezoelectric thin films; stators; torque; ultrasonic motors; 1.4 mm; 20 V; 5.0 mm; PZT; PZT thin film; PbZrO3TiO3; cylindrical stator transducer; hydrothermal method; input voltage; maximum revolution speed; micro ultrasonic motor; pre-load; starting torque; stator transducer; Electrodes; Electrostatics; Micromotors; Piezoelectric films; Rotors; Sputtering; Stators; Torque; Ultrasonic transducers; Voltage;
Conference_Titel :
Ultrasonics Symposium, 1998. Proceedings., 1998 IEEE
Conference_Location :
Sendai
Print_ISBN :
0-7803-4095-7
DOI :
10.1109/ULTSYM.1998.762237
