• DocumentCode
    338045
  • Title

    Miniaturization of surface acoustic wave linear motor

  • Author

    Takasaki, Masaya ; Osakabe, Naoki ; Kurosawa, Minoru Kuribayashi ; Higuchi, Toshiro

  • Author_Institution
    Dept. of Precision Eng., Tokyo Univ., Japan
  • Volume
    1
  • fYear
    1998
  • fDate
    1998
  • Firstpage
    679
  • Abstract
    This paper describes the way of a miniaturization of a surface acoustic wave (SAW) linear motor and the first success of driving the miniaturized SAW linear motor. A problem which occurs with the miniaturization of the motor is also mentioned. The motor was operated at 50 MHz. The miniaturized motor could work at 0.7 m/s
  • Keywords
    linear motors; micromotors; surface acoustic wave devices; ultrasonic motors; 0.7 m/s; 50 MHz; SAW linear motor; driving; miniaturization; miniaturized SAW linear motor; surface acoustic wave linear motor; Acoustic waves; Frequency; Friction; Precision engineering; Silicon; Stators; Surface acoustic waves; Surface waves; Transducers; Voltage;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Ultrasonics Symposium, 1998. Proceedings., 1998 IEEE
  • Conference_Location
    Sendai
  • ISSN
    1051-0117
  • Print_ISBN
    0-7803-4095-7
  • Type

    conf

  • DOI
    10.1109/ULTSYM.1998.762239
  • Filename
    762239
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=338045