Title :
Miniaturization of surface acoustic wave linear motor
Author :
Takasaki, Masaya ; Osakabe, Naoki ; Kurosawa, Minoru Kuribayashi ; Higuchi, Toshiro
Author_Institution :
Dept. of Precision Eng., Tokyo Univ., Japan
Abstract :
This paper describes the way of a miniaturization of a surface acoustic wave (SAW) linear motor and the first success of driving the miniaturized SAW linear motor. A problem which occurs with the miniaturization of the motor is also mentioned. The motor was operated at 50 MHz. The miniaturized motor could work at 0.7 m/s
Keywords :
linear motors; micromotors; surface acoustic wave devices; ultrasonic motors; 0.7 m/s; 50 MHz; SAW linear motor; driving; miniaturization; miniaturized SAW linear motor; surface acoustic wave linear motor; Acoustic waves; Frequency; Friction; Precision engineering; Silicon; Stators; Surface acoustic waves; Surface waves; Transducers; Voltage;
Conference_Titel :
Ultrasonics Symposium, 1998. Proceedings., 1998 IEEE
Conference_Location :
Sendai
Print_ISBN :
0-7803-4095-7
DOI :
10.1109/ULTSYM.1998.762239
