DocumentCode :
3380666
Title :
Electron beam induced current characterization of dark line defects in failed and degraded high power quantum well laser diodes
Author :
Mason, Maribeth ; Presser, Nathan ; Sin, Yongkun ; Foran, Brendan ; Moss, Steven C.
Author_Institution :
Microelectron. Technol. Dept., Aerosp. Corp., El Segundo, CA, USA
fYear :
2011
fDate :
10-14 April 2011
Abstract :
We investigate the dependence of electron beam induced current (EBIC) contrast from dark-line defects (DLDs) on temperature and voltage bias in failed and degraded high power quantum well laser diodes (HPLDs). Voltage bias induced contrast variations in EBIC allowed us to make the first observation of what may be the DLD initiation point in a degraded, but not failed, HPLD. Wavelet analysis of temperature and voltage dependent EBIC contrast reveals three distinct regions with different defect properties within the DLD. These results can be correlated to destructive physical analysis and other defect characterization techniques, such as cathodoluminescence and deep-level transient spectroscopy, to provide insight into defect types and failure mechanisms in these devices.
Keywords :
EBIC; III-V semiconductors; aluminium compounds; failure analysis; gallium arsenide; indium compounds; quantum well lasers; wavelet transforms; InGaAs-AlGaAs; cathodoluminescence; dark line defects; deep-level transient spectroscopy; defect properties; destructive physical analysis; electron beam induced current; failure mechanisms; high power quantum well laser diodes; voltage bias induced contrast variations; wavelet analysis; Diode lasers; Indium gallium arsenide; Optical imaging; Silicon compounds; Temperature dependence; Temperature measurement; Wavelet transforms; EBIC; dark-line defect; laser diode;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Reliability Physics Symposium (IRPS), 2011 IEEE International
Conference_Location :
Monterey, CA
ISSN :
1541-7026
Print_ISBN :
978-1-4244-9113-1
Electronic_ISBN :
1541-7026
Type :
conf
DOI :
10.1109/IRPS.2011.5784526
Filename :
5784526
Link To Document :
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