Title :
Driving of Micromirror and Simultaneous Detection of Rotation Angle using Integrated Piezoresistive Sensor
Author :
Sasaki, Minoru ; Tabata, Motoki ; Hane, Kazuhiro
Author_Institution :
Toyota Technol. Inst., Toyota
Abstract :
A piezoresistive rotation angle sensor is integrated in a micromirror driven by the electrostatic vertical comb drive actuator. The sensor signal is the voltage generated by the shear piezoresistance effect. Driving the electrostatic actuator, the sensor signal is measured. The sensor signal is confirmed to be proportional to the mirror rotation angle. The hysteresis of the sensor signal is found to be less than that observed under the open-control of the micromirror.
Keywords :
angular measurement; electrostatic actuators; micromirrors; piezoresistive devices; rotation measurement; electrostatic actuator; integrated piezoresistive sensor; micromirror; piezoresistive rotation angle sensor; rotation angle detection; Coils; Electrostatic actuators; Laser beams; Magnetic sensors; Micromirrors; Mirrors; Piezoresistance; Position sensitive particle detectors; Stress; Voltage; Integration; Micromirror; Piezoresistive Sensor;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007. International
Conference_Location :
Lyon
Print_ISBN :
1-4244-0842-3
Electronic_ISBN :
1-4244-0842-3
DOI :
10.1109/SENSOR.2007.4300592
