DocumentCode
3380768
Title
Driving of Micromirror and Simultaneous Detection of Rotation Angle using Integrated Piezoresistive Sensor
Author
Sasaki, Minoru ; Tabata, Motoki ; Hane, Kazuhiro
Author_Institution
Toyota Technol. Inst., Toyota
fYear
2007
fDate
10-14 June 2007
Firstpage
2151
Lastpage
2154
Abstract
A piezoresistive rotation angle sensor is integrated in a micromirror driven by the electrostatic vertical comb drive actuator. The sensor signal is the voltage generated by the shear piezoresistance effect. Driving the electrostatic actuator, the sensor signal is measured. The sensor signal is confirmed to be proportional to the mirror rotation angle. The hysteresis of the sensor signal is found to be less than that observed under the open-control of the micromirror.
Keywords
angular measurement; electrostatic actuators; micromirrors; piezoresistive devices; rotation measurement; electrostatic actuator; integrated piezoresistive sensor; micromirror; piezoresistive rotation angle sensor; rotation angle detection; Coils; Electrostatic actuators; Laser beams; Magnetic sensors; Micromirrors; Mirrors; Piezoresistance; Position sensitive particle detectors; Stress; Voltage; Integration; Micromirror; Piezoresistive Sensor;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007. International
Conference_Location
Lyon
Print_ISBN
1-4244-0842-3
Electronic_ISBN
1-4244-0842-3
Type
conf
DOI
10.1109/SENSOR.2007.4300592
Filename
4300592
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