Title :
Analysis of Valveless Piezoelectric Micropump using Electrical Equivalent Circuit Model
Author :
Tanaka, S. ; Ichihashi, O. ; Sugano, K. ; Tsuchiya, T. ; Tabata, O.
Author_Institution :
Kyoto Univ., Kyoto
Abstract :
An improved equivalent circuit model for effective calculation of a valveless piezoelectric micropump performance which is operated by a dependency of flow resistance on flow rate was proposed. The validity of the proposed model was evaluated by comparing the dynamic flow behavior calculated by the equivalent circuit model with mu-PIV measurement. From the good agreements between the analysis and the experimental results, it was concluded that a dynamic flow characteristic with microsecond scale of the micropump was able to be analyzed precisely by the developed equivalent circuit model.
Keywords :
equivalent circuits; micropumps; piezoelectric devices; valves; velocity measurement; dynamic flow behavior; electrical equivalent circuit model; flow resistance; mu-PIV measurement; valveless piezoelectric micropump; Actuators; Coupled mode analysis; Equivalent circuits; Fluid flow measurement; Immune system; Microchannel; Microfluidics; Micropumps; Solid state circuits; Voltage control; equivalent circuit; micropump; valveless; ¿-PIV; ¿-TAS;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007. International
Conference_Location :
Lyon
Print_ISBN :
1-4244-0842-3
Electronic_ISBN :
1-4244-0842-3
DOI :
10.1109/SENSOR.2007.4300600