DocumentCode :
3380899
Title :
Analysis of Valveless Piezoelectric Micropump using Electrical Equivalent Circuit Model
Author :
Tanaka, S. ; Ichihashi, O. ; Sugano, K. ; Tsuchiya, T. ; Tabata, O.
Author_Institution :
Kyoto Univ., Kyoto
fYear :
2007
fDate :
10-14 June 2007
Firstpage :
2183
Lastpage :
2186
Abstract :
An improved equivalent circuit model for effective calculation of a valveless piezoelectric micropump performance which is operated by a dependency of flow resistance on flow rate was proposed. The validity of the proposed model was evaluated by comparing the dynamic flow behavior calculated by the equivalent circuit model with mu-PIV measurement. From the good agreements between the analysis and the experimental results, it was concluded that a dynamic flow characteristic with microsecond scale of the micropump was able to be analyzed precisely by the developed equivalent circuit model.
Keywords :
equivalent circuits; micropumps; piezoelectric devices; valves; velocity measurement; dynamic flow behavior; electrical equivalent circuit model; flow resistance; mu-PIV measurement; valveless piezoelectric micropump; Actuators; Coupled mode analysis; Equivalent circuits; Fluid flow measurement; Immune system; Microchannel; Microfluidics; Micropumps; Solid state circuits; Voltage control; equivalent circuit; micropump; valveless; ¿-PIV; ¿-TAS;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007. International
Conference_Location :
Lyon
Print_ISBN :
1-4244-0842-3
Electronic_ISBN :
1-4244-0842-3
Type :
conf
DOI :
10.1109/SENSOR.2007.4300600
Filename :
4300600
Link To Document :
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