DocumentCode
3380956
Title
The development of a new class of BAW microwave acoustic devices for ecological monitoring
Author
Mansfeld, G.D. ; Kotelyansky, I.M.
Author_Institution
Institute of Radioengineering and Electronics, RAS, Moscow, Russia
Volume
1
fYear
2002
fDate
8-11 Oct. 2002
Firstpage
909
Abstract
The analysis of the possibilities of the development of new types of temperature, pressure, and gas BAW TFR and HBAR sensors is presented. Such devices are more high-frequency, sensitive and miniature than known SAW-sensors; they are compatible with small-size microwave aerials for wireless distance probing. A numerical analysis of the possible parameters of such devices is presented.
Keywords
acoustic microwave devices; bulk acoustic wave devices; gas sensors; pressure sensors; temperature sensors; BAW microwave acoustic devices; HBAR sensors; TFR sensors; device parameters; ecological monitoring; gas sensor; numerical analysis; pressure sensor; temperature sensor; wireless distance probing; Acoustic devices; Electrodes; Electromagnetic measurements; Microwave devices; Microwave sensors; Monitoring; Resonant frequency; Substrates; Temperature dependence; Temperature sensors;
fLanguage
English
Publisher
ieee
Conference_Titel
Ultrasonics Symposium, 2002. Proceedings. 2002 IEEE
ISSN
1051-0117
Print_ISBN
0-7803-7582-3
Type
conf
DOI
10.1109/ULTSYM.2002.1193544
Filename
1193544
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