• DocumentCode
    3380968
  • Title

    MEMS Applications in Hard Disk Drives

  • Author

    Hirano, Toshiki ; Yang, Henry

  • Author_Institution
    Hitachi Global Storage Technol., San Jose
  • fYear
    2007
  • fDate
    10-14 June 2007
  • Firstpage
    2203
  • Lastpage
    2206
  • Abstract
    As a new application of MEMS to hard disk drives, gimbal-chip (a MEMS chip that replaces suspension´s gimbal function) was investigated. A micro-actuator for tracking servo was also integrated in the chip. Design, process, and performance of the chip are reported.
  • Keywords
    disc drives; hard discs; microactuators; MEMS applications; gimbal function; hard disk drives; microactuators; Actuators; Disk recording; Hard disks; Magnetic heads; Microactuators; Microelectromechanical devices; Micromechanical devices; Springs; Substrates; Tracking; Hard-disk drives; gimbal; microactuator; recording density;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007. International
  • Conference_Location
    Lyon
  • Print_ISBN
    1-4244-0842-3
  • Electronic_ISBN
    1-4244-0842-3
  • Type

    conf

  • DOI
    10.1109/SENSOR.2007.4300605
  • Filename
    4300605
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3380968