Title :
MEMS Applications in Hard Disk Drives
Author :
Hirano, Toshiki ; Yang, Henry
Author_Institution :
Hitachi Global Storage Technol., San Jose
Abstract :
As a new application of MEMS to hard disk drives, gimbal-chip (a MEMS chip that replaces suspension´s gimbal function) was investigated. A micro-actuator for tracking servo was also integrated in the chip. Design, process, and performance of the chip are reported.
Keywords :
disc drives; hard discs; microactuators; MEMS applications; gimbal function; hard disk drives; microactuators; Actuators; Disk recording; Hard disks; Magnetic heads; Microactuators; Microelectromechanical devices; Micromechanical devices; Springs; Substrates; Tracking; Hard-disk drives; gimbal; microactuator; recording density;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007. International
Conference_Location :
Lyon
Print_ISBN :
1-4244-0842-3
Electronic_ISBN :
1-4244-0842-3
DOI :
10.1109/SENSOR.2007.4300605
