Title :
A Virtual Impactor for Hydrodynamic Particle Classification
Author :
Kim, Y.H. ; Park, S. ; Lim, M.H. ; Hwang, J. ; Shin, J.S. ; Kim, Y.J.
Author_Institution :
Yonsei Univ., Seoul
Abstract :
We demonstrate a passive hydrodynamic particle sorter, a micromachined virtual impactor, for classifying biological substances according to their size. The virtual impactor can classify particles from a fully chaotic mixture composed of various sized particle. The virtual impactor is fabricated through simple silicon bulk micromachining. For preliminary performance test, monodispersed V653 cells with diameter of 10 mum were classified. Percent deviation of the experimental result was 13% compared to the theoretical value. For verifying collection efficiency of the particle sorter, polystyrene beads with diameters of 3 mum and 15 mum were sorted. Collection efficiency of 3 mum polystyrene beads was 68%.
Keywords :
micromachining; particle detectors; silicon; chaotic mixture; micromachined virtual impactor; passive hydrodynamic particle sorter; percent deviation; polystyrene beads; silicon bulk micromachining; size 10 mum; Biochemical analysis; Chaos; Electronic mail; Fabrication; Fluid flow control; Hydrodynamics; Micromachining; Microstructure; Solid state circuits; Sorting; Hydrodynamic particle sorter; collection efficiency; virtual impactor;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007. International
Conference_Location :
Lyon
Print_ISBN :
1-4244-0842-3
Electronic_ISBN :
1-4244-0842-3
DOI :
10.1109/SENSOR.2007.4300612
