Fabrication and Characterization of the Piezoelectric Microcantilever Integrated with PZT Thin-Film Microforce Sensor and Actuator

Author

Liu, Mengwei ; Cui, Tianhong ; Wang, Liding

Author_Institution

Chinese Acad. of Sci., Beijing

fYear

2007

fDate

10-14 June 2007

Firstpage

2255

Lastpage

2258

Abstract

The paper presents a technology platform for micromanipulation systems based on the piezoelectric cantilevers integrated with PZT thin-film micro force sensors and actuators. Two novel piezoelectric microcantilevers with two-segment and bimorph sol-gel PZT films were designed, fabricated by bulk micromachining and tested. The sensing and actuation capability of two-segment PZT microcantilevers as microforce sensors or actuators was characterized. The sensing performance of bimorph PZT microcantilevers was compared with the conventional unimorph microcantilever. The piezoelectric constant d₃₁ of PZT films were measured without poling process.

Keywords

cantilevers; force sensors; lead compounds; microactuators; micromanipulators; microsensors; piezoelectric devices; sol-gel processing; thin film sensors; PZT thin-film microforce sensor; bimorph sol-gel films; bulk micromachining; microactuator; micromanipulation systems; piezoelectric constant; piezoelectric microcantilever; poling process; Electrodes; Fabrication; Mechanical sensors; Paper technology; Piezoelectric actuators; Piezoelectric films; Rapid thermal annealing; Sensor phenomena and characterization; Sensor systems; Thin film sensors; PZT thin film; Piezoelectric microcantilever; microactuator; microsensor;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007. International

Conference_Location

Lyon

Print_ISBN

1-4244-0842-3

Electronic_ISBN

1-4244-0842-3

Type

conf

DOI

10.1109/SENSOR.2007.4300618

Filename

4300618