Transparent SU-8 Three-Axis Micro Strain Gauge Force Sensing Pillar Arrays for Biological Applications

Author

Klejwa, N. ; Harjee, N. ; Kwon, R. ; Coulthard, S.M. ; Pruitt, B.L.

Author_Institution

Stanford Univ., Stanford

fYear

2007

fDate

10-14 June 2007

Firstpage

2259

Lastpage

2262

Abstract

This paper presents three-axis micro strain gauge force-sensitive pillar arrays constructed of multiple layers of SU-8 and metal on quartz substrates to create transparent sensors for use in standard inverted microscopes. The sensor meets specific requirements for measuring tactile sensitivity and forces exerted during locomotion by small organisms such as fruit flies (Drosophila melanogaster), including: 1 muN force sensitivity, >25 muN range, and bio-compatibility By virtue of its three-axis capability, this sensor has flexible applications for biological and non-biological force sensing.

Keywords

force sensors; sensor arrays; strain gauges; transparency; Drosophila melanogaster; biocompatibility; biological applications; force sensitivity; fruit flies; metal on quartz substrates; standard inverted microscopes; tactile sensitivity; three axis micro strain gauge force sensing pillar arrays; transparent SU 8; transparent sensors; Adhesives; Biosensors; Capacitive sensors; Chromium; Force measurement; Force sensors; Gold; Mechanical sensors; Sensor arrays; Strain measurement; Force Sensor; SU-8; Strain Gauge;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007. International

Conference_Location

Lyon

Print_ISBN

1-4244-0842-3

Electronic_ISBN

1-4244-0842-3

Type

conf

DOI

10.1109/SENSOR.2007.4300619

Filename

4300619