Title :
Thermal Characterization of Porous Silicon Micro-Hotplates using IR Thermography
Author :
Triantafyllopoulou, R. ; Tsamis, C. ; Chatzandroulis, S. ; Speliotis, T. ; Parthenios, J. ; Papagelis, K. ; Galiotis, C.
Author_Institution :
NCSR, Athens
Abstract :
In this work we used combined IR measurements with a thermocamera as well as electrical measurements in vacuum, in order to accurately estimate the temperature that develops on porous silicon micro-hotplates of various designs. An overall emissivity value epsiv=0.25 has been used, obtained from the simulation of the electrical data for various micro hotplate designs. The estimated temperature is in good agreement with the simulated results.
Keywords :
emissivity; infrared imaging; microsensors; porous materials; silicon; IR measurement; IR thermography; Si; electrical measurement; emissivity value; porous silicon microhotplates; thermal characterization; thermocamera; Electric variables measurement; Fabrication; Infrared sensors; Materials science and technology; Sensor arrays; Sensor systems; Silicon; Structural beams; Temperature sensors; Thermal conductivity; IR thermography; Micro-hotplates; Porous Silicon;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007. International
Conference_Location :
Lyon
Print_ISBN :
1-4244-0842-3
Electronic_ISBN :
1-4244-0842-3
DOI :
10.1109/SENSOR.2007.4300622
