Laser interferometric measurement of Lamb wave dispersion and extraction of material parameters in FBARs

Author

Pensala, T. ; Makkonen, T. ; Vartiainen, J. ; Knuuttila, J. ; Kaitila, J. ; Holmgren, O. ; Salomaa, M.M.

Volume

1

fYear

2002

fDate

8-11 Oct. 2002

Firstpage

977

Abstract

Laser interferometric measurement and Fourier transformation techniques have been used to extract the dispersion characteristics of a mirror (SMR) type thin film bulk acoustic wave resonator (FBAR). A numerically robust matrix method incorporating anisotropic materials and piezoelectricity has been used to calculate the dispersion curves based on information of the layer thicknesses and material parameters of individual layers. A fit has been performed between the measured and simulated curves thereby allowing the extraction of the material parameters of the ZnO piezolayer. We present the set of material parameters resulting from the fitting.

Keywords

II-VI semiconductors; acoustic wave diffraction; light interferometry; measurement by laser beam; piezoelectric semiconductors; piezoelectric thin films; semiconductor thin films; surface acoustic wave resonator filters; surface acoustic waves; zinc compounds; FBARs; Fourier transformation techniques; Lamb wave dispersion; ZnO; anisotropic materials; dispersion characteristics; dispersion curves; laser interferometric measurement; layer thicknesses; material parameters; mirror type thin film bulk acoustic wave resonator; numerically robust matrix method; piezoelectricity; Acoustic measurements; Acoustic waves; Anisotropic magnetoresistance; Data mining; Dispersion; Film bulk acoustic resonators; Mirrors; Optical materials; Piezoelectric films; Robustness;

fLanguage

English

Publisher

ieee

Conference_Titel

Ultrasonics Symposium, 2002. Proceedings. 2002 IEEE

ISSN

1051-0117

Print_ISBN

0-7803-7582-3

Type

conf

DOI

10.1109/ULTSYM.2002.1193559

Filename

1193559