Title :
Flexible PCB Vertical Thermopile IR Sensor
Author :
Lindeberg, Mikael ; Yousef, Hanna ; Rödjegård, Henrik ; Martin, Hans ; Hjort, Klas
Author_Institution :
Uppsala Univ., Uppsala
Abstract :
We present the design, fabrication and characterization of vertical thermopile infra-red (IR) sensors. The sensors are produced in batches in a standard flexible printed circuit board (flex PCB) material. The vertical design opens up for large area detection and longer thermopile chains. The sensors consist of series of 88 vertically interconnected thermocouples in a 75 mum thick polyimide foil (Kapton HNtrade). The sensors showed a voltage response to an IR pulse of 1.2 V/(W/mm2).
Keywords :
flexible electronics; infrared detectors; optical sensors; printed circuits; temperature sensors; thermocouples; thermopiles; flexible PCB vertical thermopile IR sensor; flexible printed circuit board material; infra-red sensors; polyimide foil; size 75 mum; thermopile chains; vertically interconnected thermocouples; voltage response; Infrared sensors; Integrated circuit interconnections; Lithography; Nickel; Polyimides; Sensor phenomena and characterization; Thermal conductivity; Thermal sensors; Wet etching; Wires; IR sensor; flexible printed circuit boards; through-hole via interconnects; vertical thermopiles;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007. International
Conference_Location :
Lyon
Print_ISBN :
1-4244-0842-3
Electronic_ISBN :
1-4244-0842-3
DOI :
10.1109/SENSOR.2007.4300623
