Title :
Combined acoustic-electromagnetic simulation of thin-film bulk acoustic wave filters
Author :
Milsom, R.F. ; Löbl, H.P. ; Peligrad, D.N. ; Lobeek, J.W. ; Tuinhout, A. ; ten Dolle, R.H.
Author_Institution :
Philips Res. Labs., Redhill, UK
Abstract :
A method for simultaneously modeling acoustic and electromagnetic (EM) behaviour of thin-film BAW RF filters is described. The inclusion of EM effects is important for fully understanding both passband loss and stopband rejection. Two lumped equivalent-circuit EM models are described. These are compared with measurement of solidly-mounted resonator (SBAR) filters up to 10 GHz.
Keywords :
acoustic microwave devices; acoustic resonator filters; band-pass filters; bulk acoustic wave devices; digital simulation; equivalent circuits; modelling; radiofrequency filters; thin films; 10 GHz; BAW RF filters; combined acoustic-electromagnetic simulation; lumped equivalent-circuit EM models; passband loss; solidly-mounted resonator filters; stopband rejection; thin-film bulk acoustic wave filters; Acoustic waves; Bonding; Brain modeling; Dielectric losses; Hafnium; Laboratories; Packaging; Radio frequency; Resonator filters; Transistors;
Conference_Titel :
Ultrasonics Symposium, 2002. Proceedings. 2002 IEEE
Print_ISBN :
0-7803-7582-3
DOI :
10.1109/ULTSYM.2002.1193562
