Title :
Miniature Tunneloxide Electrodes on Silicon for Aqueous Hot Electron Electrochemistry and Electrochemiluminecscence Studies
Author :
Niskanen, A.J. ; Ylinen, T. ; Håkansson, M. ; Suomi, J. ; Ala-Kleme, T. ; Kulmala, S. ; Franssila, S.
Author_Institution :
Helsinki Univ. of Technol., Helsinki
Abstract :
The basic principles of cathodic hot electron-induced electrochemiluminescence (HECL) and hot electron (HE) injection into aqueous electrolyte solution are shortly discussed. The applicability of miniaturized oxide-coated silicon electrodes as working electrodes in detection of electrochemiluminescent labels by HECL is studied. In addition, the fabrication processes of these tunnel oxide electrodes are described, and an immunoassay is used as an example of a real bioaffinity assay carried out using oxide-coated silicon electrodes.
Keywords :
bioMEMS; electrochemistry; electroluminescent devices; elemental semiconductors; hot carriers; microelectrodes; silicon; Si; aqueous electrolyte solution; bioaffinity assay; electrochemiluminescent labels; fabrication process; hot electron electrochemistry; hot electron injection; immunoassay; miniaturized tunnel oxide-coated silicon electrodes; Chemical analysis; Chemical technology; Chemistry; Electrodes; Electron emission; Inorganic materials; Insulation; Laboratories; Metal-insulator structures; Silicon; Hot electron-induced electrochemiluminescence (HECL); Hot electrons; electrochemiluminescence (ECL); miniaturized tunnel oxide Si-electrode; oxide-coated Si-electrode;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007. International
Conference_Location :
Lyon
Print_ISBN :
1-4244-0842-3
Electronic_ISBN :
1-4244-0842-3
DOI :
10.1109/SENSOR.2007.4300630
