Title :
Microfabricated Gate-Modulated Electrochemical Ion Spectroscopy Sensor
Author :
Tabib-Azar, M. ; Wang, R. ; Mutlu, S. ; Mastrangelo, C.H. ; Gianchandani, Y.B.
Author_Institution :
Case Western Reserve Univ., Cleveland
Abstract :
Flow-through field effect transistor structures are utilized as tunable, electrochemical ion- selective sensors to analyze the ionic content of channel fluids from drain-source current measurements and gate conductance spectroscopy. Compared to ion-selective electrodes in a flowFET its gate region acts as a programmable membrane determined by the gate potential. DC measurement results using aqueous solutions of NaCl and CuSO4 in the 10-4-10-7 molar range are discussed.
Keywords :
electrochemical sensors; field effect transistors; microsensors; spectroscopy; CuSO4; NaCl; channel fluid; drain-source current measurement; field effect transistor structure; gate conductance spectroscopy; ionic content; microfabricated gate-modulated electrochemical ion spectroscopy sensor; molar range; tunable sensor; Actuators; Contacts; Electrodes; FETs; Fluid flow control; Frequency; Intrusion detection; Solid state circuits; Spectroscopy; Voltage; EOF; Ion selective sensors;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007. International
Conference_Location :
Lyon
Print_ISBN :
1-4244-0842-3
Electronic_ISBN :
1-4244-0842-3
DOI :
10.1109/SENSOR.2007.4300631