Title :
High quality-factor inductors integrated on Si multichip modules
Author :
Zu, Larry ; Lu, Yicheng ; Frye, Robert C. ; Lau, Maureen Y. ; Chen, Sandy ; Kossives, Dean ; Hrycenko, Frank ; Lin, Jenshan ; Lin, Qing ; Tai, King L.
Author_Institution :
AT&T Bell Labs., Murray Hill, NJ, USA
Abstract :
We report high quality (Q) factor inductors fabricated on a high-resistivity (2000 Ω-cm) Si substrate with MCM technology. Q-factors of 30-40 were achieved for inductors of a few nH at 1 GHz
Keywords :
Q-factor; inductors; multichip modules; silicon; 1 GHz; MCM technology; Si; high-resistivity Si substrate; integrated inductors; multichip modules; quality-factor; Contacts; Dielectric substrates; Frequency; Inductance; Multichip modules; Polyimides; Q factor; Scattering parameters; Testing; Thin film inductors;
Conference_Titel :
Electrical Performance of Electronic Packaging, 1995
Conference_Location :
Portland, OR
Print_ISBN :
0-7803-3034-X
DOI :
10.1109/EPEP.1995.524882
