Research on electromechanical model of micro-accelerometer based on SOI technology

To cope with the imprecise model of electro-mechanical integration simulation and complex process of parameter extraction, a Simulink model of micro-accelerometer based on SOI technology is proposed in this paper. The model realizes the very closely results between the simulation without device-level circuits and Coventor Ware simulation. Compared with the results of experimental test, the error of voltage sensitivity is less than 2%, the error of differential capacitance sensitivity is less than 8%, and acceleration bias is less than 10%. So the model can realize the simulation of electro-mechanical integration and be helpful in fast optimization of the parameter of structure and circuits, and the model has better reference function to the research of MEMS inertial device.