Title :
Detecting laser beam reflectance modulated by electronic device operation with a simple setup
Author :
Pagano, Carlo ; Boit, Christian ; Yokoyama, Yoshiyuki
Author_Institution :
Dept. of Semicond. Devices, Berlin Univ. of Technol., Berlin, Germany
Abstract :
Modulation of reflected light intensity by electronic device operation is well established as a backside contactless probing technique. In this paper, we present a simple setup for mapping reflected light signals across semiconductor devices. In the experiment, metal-oxide-semiconductor field-effect transistors (MOSFET) were used in different operating conditions.
Keywords :
MOSFET; reflectivity; MOSFET; backside contactless probing; electronic device operation; laser beam reflectance; light intensity; metal-oxide-semiconductor field-effect transistors; reflected light signals; semiconductor devices; Correlation; Logic gates; Measurement by laser beam; Modulation; Pixel; Thyristors; Transistors; Absorption coefficient; Backside techniques; Contactless measurement; Failure Analysis; Laser Voltage Probing; Reflectance; Space charge region; p-n junction;
Conference_Titel :
Reliability Physics Symposium (IRPS), 2011 IEEE International
Conference_Location :
Monterey, CA
Print_ISBN :
978-1-4244-9113-1
Electronic_ISBN :
1541-7026
DOI :
10.1109/IRPS.2011.5784576
