Title :
Improvement of the architecture for MEMS resonator quality factor measurement
Author :
Zhang, Ming ; Llaser, Nicolas ; Mathias, Hervé
Author_Institution :
CNRS, Univ. of Paris XI, Orsay
fDate :
Aug. 31 2008-Sept. 3 2008
Abstract :
In this paper, the performance analysis of our previously proposed architecture for MEMS resonator quality factor measurement is carried out in taking into account the imperfection of each functional block of the architecture. This analysis puts in evidence the impact of the imperfection of each functional block on the measurement precision and predicts the attainable measurement precision of this architecture. In order to improve the performance, an improved architecture is proposed, with which the measurement precision can be improved at least a factor of 2.
Keywords :
Q-factor measurement; micromechanical resonators; MEMS resonator; measurement precision; performance analysis; quality factor measurement; Detectors; Frequency measurement; Micromechanical devices; Performance analysis; Q factor; Resonance; Resonant frequency; Temperature sensors; Time measurement; Voltage;
Conference_Titel :
Electronics, Circuits and Systems, 2008. ICECS 2008. 15th IEEE International Conference on
Conference_Location :
St. Julien´s
Print_ISBN :
978-1-4244-2181-7
Electronic_ISBN :
978-1-4244-2182-4
DOI :
10.1109/ICECS.2008.4674839
