6Mhz Bulk-Mode Resonator with Q Values Exceeding One Million

Author

Khine, Lynn ; Palaniapan, Moorthi ; Wong, Wai-Kin

Author_Institution

Nat. Univ. of Singapore, Singapore

fYear

2007

fDate

10-14 June 2007

Firstpage

2445

Lastpage

2448

Abstract

In this paper, we report a 6.3 MHz Lame-mode square resonator with fully differential drive and sense electronics, exhibiting quality factor, Q values exceeding 1 million in ambient pressures as high as 100 Pa. A maximum Q value of 1.6 million was experimentally measured at vacuum pressure of 36 muTorr. It was also experimentally observed that the Q value for the bulk mode resonator was relatively independent for pressures below 100 Pa suggesting that the Q is pressure limited for pressure higher than 100 Pa. This resonator was fabricated using SOIMUMPs process from MEMSCAP.

Keywords

Q-factor; micromechanical resonators; Lame-mode square resonator; bulk-mode resonator; differential drive; frequency 6 GHz to 6.3 GHz; micromechanical resonators; quality factor; sense electronics; Acoustic beams; Frequency; Micromechanical devices; Oscillators; Phase noise; Pressure measurement; Q factor; Q measurement; Resonance; Resonator filters; Bulk-mode; Quality factor; differential drive; micromechanical; resonators;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007. International

Conference_Location

Lyon

Print_ISBN

1-4244-0842-3

Electronic_ISBN

1-4244-0842-3

Type

conf

DOI

10.1109/SENSOR.2007.4300665

Filename

4300665