Photonic MEMS: From Laser Physics to Cell Biology

Author

Liu, A.Q. ; Zhang, X.M.

Author_Institution

Nanyang Technol. Univ., Singapore

fYear

2007

fDate

10-14 June 2007

Firstpage

2485

Lastpage

2488

Abstract

This paper reviews the recent progress from optical MEMS to photonic MEMS, nano- photonics and biophotonic MEMS, which represents a latest trend of the expansion and penetration of the MEMS technology to the nano and bio areas. Different types of devices are demonstrated as the examples of the natural synergy of MEMS with the photonics, including thermo-optic switches, tunable lasers, injection-locked laser systems, nano-photonic bandgap devices and biophotonic cell chips. The use of MEMS not only produces better integration, robustness and compactness, but also improves the functionalities and specifications of the devices.

Keywords

bioMEMS; nanobiotechnology; photonic band gap; semiconductor lasers; thermo-optical devices; biophotonic MEMS; biophotonic cell chips; cell biology; injection-locked laser systems; laser physics; nanophotonic bandgap devices; nanophotonics MEMS; thermo-optic switches; tunable lasers; Biological cells; Biomedical optical imaging; Biophotonics; Laser theory; Micromechanical devices; Nanobioscience; Optical switches; Photonic band gap; Physics; Thermooptical devices; Biophotonics; MEMS; Photonic crystal bandgap; Thermo-optics;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007. International

Conference_Location

Lyon

Print_ISBN

1-4244-0842-3

Electronic_ISBN

1-4244-0842-3

Type

conf

DOI

10.1109/SENSOR.2007.4300675

Filename

4300675