Title :
The hydrid model for SAW filter
Author :
Trang Hoang ; Rey, Patrice ; Vaudaine, M.-H. ; Robert, Philippe ; Benech, Ph
Author_Institution :
Heterogeneous Silicon Integration Dept., CEA/LETI, Grenoble
fDate :
Aug. 31 2008-Sept. 3 2008
Abstract :
The design, modeling, fabrication and characterization of SAW filter are presented. The hybrid model is proposed and has a good agreement with measurement. This model would be helpful to design SAW filter that takes into account the distance between two IDTs, and therefore, is also helpful for design SAW based pressure sensor in which the applied pressure will change the distance between two IDTs.
Keywords :
interdigital transducers; pressure sensors; surface acoustic wave filters; surface acoustic wave sensors; surface acoustic wave transducers; IDT; SAW filter design; SAW filter fabrication; SAW-based pressure sensor; hybrid model; Acoustic measurements; Acoustic propagation; Acoustic waves; Delay lines; Equivalent circuits; Fingers; SAW filters; Surface acoustic wave devices; Surface acoustic waves; Surface morphology;
Conference_Titel :
Electronics, Circuits and Systems, 2008. ICECS 2008. 15th IEEE International Conference on
Conference_Location :
St. Julien´s
Print_ISBN :
978-1-4244-2181-7
Electronic_ISBN :
978-1-4244-2182-4
DOI :
10.1109/ICECS.2008.4674859
