Self-Sensing Quartz-Crystal Cantilever for Nanometric Sensing

Author

Lin, Yu-Ching ; Ono, Takahito ; Esashi, Masayoshi

Author_Institution

Tohoku Univ., Sendai

fYear

2007

fDate

10-14 June 2007

Firstpage

2513

Lastpage

2516

Abstract

A self-sensing cantilever of AT-cut quartz plate was developed to achieve a high sensitivity under various environments at room temperature. The cantilevers fabricated by deep reactive ion etching with metal electrodes at the both sides have the thicknesses of 20 mum. The external force at shear- vibration direction induces the resonant frequency changes at thickness-shear vibration mode. The frequency modulation (FM) detection of thickness-shear vibration was demonstrated and the sensitivity and noise lever were investigated.

Keywords

force sensors; frequency modulation; oscillators; sputter etching; deep reactive ion etching; frequency modulation detection; metal electrodes; nanometric sensing; resonant frequency; self-sensing quartz-crystal cantilever; shear-vibration direction; thickness-shear vibration; thickness-shear vibration mode; Electrodes; Etching; Frequency modulation; Inverters; Optical resonators; Oscillators; RLC circuits; Resonant frequency; Temperature sensors; Vibrations; cantilever; frequency modulation; quartz-crystal; self-sensing;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007. International

Conference_Location

Lyon

Print_ISBN

1-4244-0842-3

Electronic_ISBN

1-4244-0842-3

Type

conf

DOI

10.1109/SENSOR.2007.4300682

Filename

4300682