Title :
Self-Sensing Quartz-Crystal Cantilever for Nanometric Sensing
Author :
Lin, Yu-Ching ; Ono, Takahito ; Esashi, Masayoshi
Author_Institution :
Tohoku Univ., Sendai
Abstract :
A self-sensing cantilever of AT-cut quartz plate was developed to achieve a high sensitivity under various environments at room temperature. The cantilevers fabricated by deep reactive ion etching with metal electrodes at the both sides have the thicknesses of 20 mum. The external force at shear- vibration direction induces the resonant frequency changes at thickness-shear vibration mode. The frequency modulation (FM) detection of thickness-shear vibration was demonstrated and the sensitivity and noise lever were investigated.
Keywords :
force sensors; frequency modulation; oscillators; sputter etching; deep reactive ion etching; frequency modulation detection; metal electrodes; nanometric sensing; resonant frequency; self-sensing quartz-crystal cantilever; shear-vibration direction; thickness-shear vibration; thickness-shear vibration mode; Electrodes; Etching; Frequency modulation; Inverters; Optical resonators; Oscillators; RLC circuits; Resonant frequency; Temperature sensors; Vibrations; cantilever; frequency modulation; quartz-crystal; self-sensing;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007. International
Conference_Location :
Lyon
Print_ISBN :
1-4244-0842-3
Electronic_ISBN :
1-4244-0842-3
DOI :
10.1109/SENSOR.2007.4300682
