Precise MEMS Gyroscope with Ladder Structure

We report a precise MEMS gyroscope with a ´ladder structure´, which was designed to reduce acceleration sensitivity, temperature dependence of sensitivity, and offset drift. This gyroscope has four masses linked by two parallel straight beams, and each mass oscillates in opposite directions in a driving mode. A sensor module using the fabricated gyroscope shows low acceleration sensitivity and stable characteristics in the presence of temperature changes. This gyroscope will be useful for car navigation systems, for example, where high precision is necessary.