Pneumatically-Actuated Tunable Microlens for Endoscopic Optical Coherence Tomography

Author

Aljasem, Khaled ; Werber, Armin ; Reichelt, Stephan ; Mader, Daniel ; Zappe, Hans

Author_Institution

Univ. of Freiburg, Freiburg

fYear

2007

fDate

10-14 June 2007

Firstpage

2557

Lastpage

2560

Abstract

A pneumatically-actuated micro-lens integrated in the sample arm of a time-domain optical coherence tomography (OCT) system is presented. A 50 mum thick polydimethylsiloxane (PDMS) membrane is spun onto the front side of the lens. Deep-reactive ion-etching (DRIE) is applied to create the aperture of the lens. Dynamically shifting the focal length for each A-scan step enhances the axial scan length and the contrast of the backscattered interference signal of the structures beneath the surface. The successful integration of the micro-lens with an OCT system allows its use in endoscopic in-vivo applications.

Keywords

adaptive optics; backscatter; bioMEMS; biomedical equipment; biomedical optical imaging; endoscopes; micro-optomechanical devices; microlenses; optical focusing; optical tomography; optical tuning; pneumatic actuators; polymer films; sputter etching; adaptive lens; backscattered interference signal; deep-reactive ion-etching; endoscopic optical coherence tomography; in-vivo biomedical applications; lens aperture; pneumatically-actuated tunable microlens; polydimethylsiloxane membrane; size 50 mum; time-domain OCT system; Biomedical optical imaging; Biomembranes; Interference; Lenses; Light emitting diodes; Microoptics; Optical interferometry; Optical sensors; Silicon; Tomography; Micro-lens; Micro-optics; Optical coherence tomography; Polydimethylsiloxane;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007. International

Conference_Location

Lyon

Print_ISBN

1-4244-0842-3

Electronic_ISBN

1-4244-0842-3

Type

conf

DOI

10.1109/SENSOR.2007.4300693

Filename

4300693