Title :
Pneumatically-Actuated Tunable Microlens for Endoscopic Optical Coherence Tomography
Author :
Aljasem, Khaled ; Werber, Armin ; Reichelt, Stephan ; Mader, Daniel ; Zappe, Hans
Author_Institution :
Univ. of Freiburg, Freiburg
Abstract :
A pneumatically-actuated micro-lens integrated in the sample arm of a time-domain optical coherence tomography (OCT) system is presented. A 50 mum thick polydimethylsiloxane (PDMS) membrane is spun onto the front side of the lens. Deep-reactive ion-etching (DRIE) is applied to create the aperture of the lens. Dynamically shifting the focal length for each A-scan step enhances the axial scan length and the contrast of the backscattered interference signal of the structures beneath the surface. The successful integration of the micro-lens with an OCT system allows its use in endoscopic in-vivo applications.
Keywords :
adaptive optics; backscatter; bioMEMS; biomedical equipment; biomedical optical imaging; endoscopes; micro-optomechanical devices; microlenses; optical focusing; optical tomography; optical tuning; pneumatic actuators; polymer films; sputter etching; adaptive lens; backscattered interference signal; deep-reactive ion-etching; endoscopic optical coherence tomography; in-vivo biomedical applications; lens aperture; pneumatically-actuated tunable microlens; polydimethylsiloxane membrane; size 50 mum; time-domain OCT system; Biomedical optical imaging; Biomembranes; Interference; Lenses; Light emitting diodes; Microoptics; Optical interferometry; Optical sensors; Silicon; Tomography; Micro-lens; Micro-optics; Optical coherence tomography; Polydimethylsiloxane;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007. International
Conference_Location :
Lyon
Print_ISBN :
1-4244-0842-3
Electronic_ISBN :
1-4244-0842-3
DOI :
10.1109/SENSOR.2007.4300693
