• DocumentCode
    3382755
  • Title

    Integrated Nickel Micro-Nano-Hall Sensors on SU-8 Cantilevers for Scanning Hall Probe Microscopy

  • Author

    Mouaziz, S. ; Imboden, C. ; Santschi, C. ; Mena, O. Vazquez ; Popovic, R. ; Brugger, J. ; Boero, G.

  • Author_Institution
    Ecole Polytech. Federate de Lausanne (EPFL), Lausanne
  • fYear
    2007
  • fDate
    10-14 June 2007
  • Firstpage
    2589
  • Lastpage
    2592
  • Abstract
    We report the fabrication and characterization of nickel Hall sensors integrated on SU-8 cantilevers. Sensors having active area down to 1 x 1 mum 2 show a magnetic field resolution better than 1 /n muT / Hz 1/2 in the thermal noise frequency range. The fabricated devices have been tested for magnetic imaging using the scanning Hall probe microscopy technique.
  • Keywords
    Hall effect transducers; cantilevers; magnetic field effects; scanning probe microscopy; thermal noise; SU-8 cantilever; integrated nickel micronano-Hall sensor; magnetic field resolution; magnetic imaging; scanning Hall probe microscopy; thermal noise; Active noise reduction; Fabrication; Frequency; Hall effect devices; Magnetic noise; Magnetic sensors; Microscopy; Nickel; Sensor phenomena and characterization; Thermal sensors; Magnetic field sensors; SU-8; scanning Hall probe microscopy;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007. International
  • Conference_Location
    Lyon
  • Print_ISBN
    1-4244-0842-3
  • Electronic_ISBN
    1-4244-0842-3
  • Type

    conf

  • DOI
    10.1109/SENSOR.2007.4300701
  • Filename
    4300701
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3382755