DocumentCode
3382865
Title
Growth of n-type multicrystalline silicon ingots from recycled CZ silicon feedstock
Author
Dhamrin, M. ; Uzum, A. ; Saitoh, T. ; Yamaga, I. ; Kamisak, K.
Author_Institution
Tokyo University of Agriculture and Technology, 2-24-16 Nakacho, Koganei, 184-8588, Japan
fYear
2008
fDate
11-16 May 2008
Firstpage
1
Lastpage
4
Abstract
5 Ω·cm recycled n-type CZ silicon feedstock is used to grow n-type multicrystalline silicon to investigate the possibilities of using other feedstock resources available from the rejected silicon of the semiconductor industry. High diffusion lengths were realized near the bottom region due to the less impurity contamination and relatively high resistivity. The heavy accumulation of metal impurities and lower resistivity at the top of the ingot resulted in a poor diffusion length. The edges have lower diffusion lengths due to the different metallic contaminations diffused from the silicon nitride coating layer during the growth cycle. The response of the wafers to p-gettering was ascertained and carrier lifetimes improved further especially at the bottom of the ingot. The improvement was realized for a total of 80% of the ingot height with higher lifetimes exceeding values above 250 μs at Δn = 1015 cm−3 and 400 ·s at Δn = 1014 cm−3.
Keywords
Charge carrier lifetime; Coatings; Conductivity; Contamination; Crystalline materials; Electronics industry; Furnaces; Photovoltaic cells; Semiconductor impurities; Silicon;
fLanguage
English
Publisher
ieee
Conference_Titel
Photovoltaic Specialists Conference, 2008. PVSC '08. 33rd IEEE
Conference_Location
San Diego, CA, USA
ISSN
0160-8371
Print_ISBN
978-1-4244-1640-0
Electronic_ISBN
0160-8371
Type
conf
DOI
10.1109/PVSC.2008.4922784
Filename
4922784
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