Multi-physics Model of MOEMS-based Switch for All-Optical Interconnection Networks

Author

Plander, Ivan ; Stepanovsky, Michal

Author_Institution

A. Dubcek Univ. of Trencin, Trencin

fYear

2007

fDate

19-22 Aug. 2007

Firstpage

85

Lastpage

86

Abstract

This work describes a multi-physics model of MOEMS-based optical switch for all-optical interconnection networks. The model covers four physical areas -mechanical, hydro-dynamical, electrical and optical ones. The simulation of behavior of the micro-mirror is relatively complicated problem because there is two-way coupling between electric field and mechanical structure of the switch and also two-way coupling between mechanical structure of the switch and surrounding air.

Keywords

micro-optomechanical devices; micromirrors; optical interconnections; optical switches; MOEMS; all-optical interconnection networks; electric field; electrostatics; hydrodynamics; mechanical structure; micromirror; multiphysics model; optical switch; two-way coupling; Damping; Electrostatics; Equations; Frequency; Mirrors; Multiprocessor interconnection networks; Optical sensors; Optical switches; Springs; Torque; MOEMS optical switch; control of micro-mirror; multi-physics model; multi-physics simulation;

fLanguage

English

Publisher

ieee

Conference_Titel

Photonics in Switching, 2007

Conference_Location

San Francisco, CA

Print_ISBN

1-4244-1121-1

Electronic_ISBN

1-4244-1122-X

Type

conf

DOI

10.1109/PS.2007.4300762

Filename

4300762