Multilayer gratings: characterization and application

Author

Dmitruk, N.L. ; Mayeva, O.I. ; Yastrubchak, O.B. ; Mamykin, S.V. ; Klopfleish, M.

Author_Institution

Inst. of Semicond. Phys., Acad. of Sci., Kiev, Ukraine

Volume

1

fYear

1999

fDate

1999

Firstpage

331

Abstract

The characterization methods for a multicoated grating as an optochemical sensor are described. The optochemical sensor uses surface plasmon resonance (SPR) on metal Au thin film vacuum evaporated on a diffraction grating prepared by holographic technique on a GaAs single-crystal. Concentration of the chemical solution is obtained by measuring the SPR condition changes, which are given by the dielectric constant of the solution tested. Characterization of multilayer gratings and demonstration of sensor application are given

Keywords

chemical sensors; gold; holographic gratings; metallic thin films; optical multilayers; optical sensors; permittivity; surface plasmon resonance; vacuum deposited coatings; Au; Au thin film; GaAs; GaAs single-crystal; application; characterization; chemical solution concentration; dielectric constant; diffraction grating; holographic technique; multilayer gratings; optochemical sensor; surface plasmon resonance; vacuum evaporated film; Chemical sensors; Dielectric thin films; Gold; Gratings; Nonhomogeneous media; Plasmons; Resonance; Sensor phenomena and characterization; Thin film sensors; Vacuum technology;

fLanguage

English

Publisher

ieee

Conference_Titel

Semiconductor Conference, 1999. CAS '99 Proceedings. 1999 International

Conference_Location

Sinaia

Print_ISBN

0-7803-5139-8

Type

conf

DOI

10.1109/SMICND.1999.810530

Filename

810530