Title :
Multilayer gratings: characterization and application
Author :
Dmitruk, N.L. ; Mayeva, O.I. ; Yastrubchak, O.B. ; Mamykin, S.V. ; Klopfleish, M.
Author_Institution :
Inst. of Semicond. Phys., Acad. of Sci., Kiev, Ukraine
Abstract :
The characterization methods for a multicoated grating as an optochemical sensor are described. The optochemical sensor uses surface plasmon resonance (SPR) on metal Au thin film vacuum evaporated on a diffraction grating prepared by holographic technique on a GaAs single-crystal. Concentration of the chemical solution is obtained by measuring the SPR condition changes, which are given by the dielectric constant of the solution tested. Characterization of multilayer gratings and demonstration of sensor application are given
Keywords :
chemical sensors; gold; holographic gratings; metallic thin films; optical multilayers; optical sensors; permittivity; surface plasmon resonance; vacuum deposited coatings; Au; Au thin film; GaAs; GaAs single-crystal; application; characterization; chemical solution concentration; dielectric constant; diffraction grating; holographic technique; multilayer gratings; optochemical sensor; surface plasmon resonance; vacuum evaporated film; Chemical sensors; Dielectric thin films; Gold; Gratings; Nonhomogeneous media; Plasmons; Resonance; Sensor phenomena and characterization; Thin film sensors; Vacuum technology;
Conference_Titel :
Semiconductor Conference, 1999. CAS '99 Proceedings. 1999 International
Conference_Location :
Sinaia
Print_ISBN :
0-7803-5139-8
DOI :
10.1109/SMICND.1999.810530
