Title :
A novel self aligned processing technique for mushroom-stripe lasers
Author :
Zhu, Hong-Liang ; Hillmer, H. ; Burkhard, H. ; Hartnagel, H.L.
Author_Institution :
Inst. of Semicond., Acad. Sinica, Beijing, China
Abstract :
A novel self-aligned processing technique for fabricating mushroom-stripe lasers was proposed. This method greatly simplified the process of the mushroom-stripe lasers. Using this newly developed technology, the bent waveguide mushroom-stripe InGaAs MQW DFB multisection tunable lasers have been studied and implemented successfully.
Keywords :
III-V semiconductors; distributed feedback lasers; gallium arsenide; indium compounds; laser tuning; optical fabrication; quantum well lasers; semiconductor technology; waveguide lasers; InGaAs; bent waveguide mushroom-stripe InGaAs MQW DFB multisection tunable lasers; laser fabrication; mushroom-stripe lasers; self aligned processing technique; Dry etching; Electrodes; Indium gallium arsenide; Laser modes; Laser theory; Laser tuning; Optical waveguides; Tunable circuits and devices; Waveguide lasers; Wet etching;
Conference_Titel :
Semiconductor Laser Conference, 1996., 15th IEEE International
Conference_Location :
Haifa, Israel
Print_ISBN :
0-7803-3163-X
DOI :
10.1109/ISLC.1996.553771
