Title :
Pulsed laser deposition of dielectric and superconducting materials: Mechanisms and applications
Author_Institution :
Inst. of Sci. & Ind. Res., Osaka Univ., Japan
Abstract :
The laser ablation method is suitable for the formation of metal oxide thin films, such as dielectric materials and high T/sub c/ superconductors. This is because the laser beam comes from outside the film formation chamber and therefore oxygen pressure can be chosen as a desired value for the growth of thin films. The author prepares PbTiO/sub 3/ thin films, SrTiO/sub 3/-BaTiO/sub 3/ dielectric strained superlattices, BaCaCuO superconducting thin films and AuBaCuO superconducting superlattices.
Keywords :
barium compounds; calcium compounds; dielectric materials; dielectric thin films; gold compounds; high-temperature superconductors; lead compounds; pulsed laser deposition; strontium compounds; superconducting superlattices; superconducting thin films; superlattices; AuBaCuO; BaCaCuO; PbTiO/sub 3/; SrTiO/sub 3/-BaTiO/sub 3/; dielectric strained superlattices; dielectric thin films; pulsed laser deposition; superconducting superlattices; superconducting thin films; Dielectric materials; Dielectric thin films; Laser ablation; Laser beams; Optical pulses; Pulsed laser deposition; Superconducting films; Superconducting thin films; Superconductivity; Superlattices;
Conference_Titel :
Advanced Applications of Lasers in Materials Processing/Broadband Optical Networks/Smart Pixels/Optical MEMs and Their Applications. IEEE/LEOS 1996 Summer Topical Meetings:
Conference_Location :
Keystone, CO, USA
Print_ISBN :
0-7803-3175-3
DOI :
10.1109/LEOSST.1996.540654
