DocumentCode
3385939
Title
Statistical process simulation with neural network single step feed-back for automatic process monitoring and control
Author
Chen, Vincent M C ; Lin, Yung-Tao ; Peng, Yeng-bung
Author_Institution
Submicron Dev. Center, Adv. Micro Devices, Sunnyvale, CA, USA
fYear
1997
fDate
10-12 Sep 1997
Firstpage
33
Lastpage
36
Abstract
This project integrates flexible data collection module, relational database, manufacturing execution system (MES) interface, and a simulation system that employs statistical approach and advanced numerical processing methodology. Concept of process-step-decoupling using statistical data correlation and automatic simulation calibration are implemented. The purpose is to have an accurate system that satisfies manufacturing requirements and at the same time a flexible system that satisfies development requirements. This tool is practical in the sense that the maintenance, employment and development cycle are in synchronize with the technology development cycle, and hence the help that the engineer needed can be provides at the right time
Keywords
production engineering computing; recurrent neural nets; semiconductor process modelling; statistical process control; automatic calibration; data correlation; flexible data collection module; manufacturing execution system interface; neural network; numerical processing; process control; process monitoring; process step decoupling; relational database; single step feedback; statistical process simulation; Analytical models; Automatic control; Calibration; Computerized monitoring; Data engineering; Manufacturing processes; Neural networks; Physics; Process control; Silicon;
fLanguage
English
Publisher
ieee
Conference_Titel
Advanced Semiconductor Manufacturing Conference and Workshop, 1997. IEEE/SEMI
Conference_Location
Cambridge, MA
ISSN
1078-8743
Print_ISBN
0-7803-4050-7
Type
conf
DOI
10.1109/ASMC.1997.630701
Filename
630701
Link To Document