• DocumentCode
    3385939
  • Title

    Statistical process simulation with neural network single step feed-back for automatic process monitoring and control

  • Author

    Chen, Vincent M C ; Lin, Yung-Tao ; Peng, Yeng-bung

  • Author_Institution
    Submicron Dev. Center, Adv. Micro Devices, Sunnyvale, CA, USA
  • fYear
    1997
  • fDate
    10-12 Sep 1997
  • Firstpage
    33
  • Lastpage
    36
  • Abstract
    This project integrates flexible data collection module, relational database, manufacturing execution system (MES) interface, and a simulation system that employs statistical approach and advanced numerical processing methodology. Concept of process-step-decoupling using statistical data correlation and automatic simulation calibration are implemented. The purpose is to have an accurate system that satisfies manufacturing requirements and at the same time a flexible system that satisfies development requirements. This tool is practical in the sense that the maintenance, employment and development cycle are in synchronize with the technology development cycle, and hence the help that the engineer needed can be provides at the right time
  • Keywords
    production engineering computing; recurrent neural nets; semiconductor process modelling; statistical process control; automatic calibration; data correlation; flexible data collection module; manufacturing execution system interface; neural network; numerical processing; process control; process monitoring; process step decoupling; relational database; single step feedback; statistical process simulation; Analytical models; Automatic control; Calibration; Computerized monitoring; Data engineering; Manufacturing processes; Neural networks; Physics; Process control; Silicon;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Advanced Semiconductor Manufacturing Conference and Workshop, 1997. IEEE/SEMI
  • Conference_Location
    Cambridge, MA
  • ISSN
    1078-8743
  • Print_ISBN
    0-7803-4050-7
  • Type

    conf

  • DOI
    10.1109/ASMC.1997.630701
  • Filename
    630701