• DocumentCode
    3386062
  • Title

    Optical actuation of micromechanical tunneling structures

  • Author

    Dragoman, M. ; Dragoman, D.

  • Author_Institution
    Nat. Res. & Dev. Inst. in Microtechnol., Bucharest, Romania
  • Volume
    2
  • fYear
    1999
  • fDate
    36434
  • Firstpage
    451
  • Abstract
    An efficient method to optically actuate a micromechanical cantilever is presented. Measurable responses are obtained for moderate light sources if electron tunneling occurs between the cantilever tip and a metallic contact below it. The small cantilever deflection due to light pressure produces large tunneling current variations. Several applications are presented
  • Keywords
    microactuators; radiation pressure; tunnelling; electron tunneling; light pressure; micromechanical cantilever; optical actuation; Atom optics; Electron optics; Iron; Micromechanical devices; Optical beams; Optical materials; Optical microscopy; Optical reflection; Tunneling; Voltage;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Semiconductor Conference, 1999. CAS '99 Proceedings. 1999 International
  • Conference_Location
    Sinaia
  • Print_ISBN
    0-7803-5139-8
  • Type

    conf

  • DOI
    10.1109/SMICND.1999.810584
  • Filename
    810584
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3386062