DocumentCode
3386151
Title
Gold on chromium pressure sensing structures on polyimide membranes
Author
Petrini, Ioana ; Müller, A. ; Avramescu, V. ; Simion, G. ; Nitescu, N. ; Vasilache, D. ; Badilita, V. ; Dascalu, D. ; Constantinidis, G.
Author_Institution
IMT, Bucharest, Romania
Volume
2
fYear
1999
fDate
36434
Firstpage
479
Abstract
This paper presents the manufacturing of a simple pressure sensing structure supported on polyimide membranes obtained by micromachining of a GaAs substrate. The sensing element is a gold on chromium resistor on the polymide membrane. The technological process for the manufacturing of this structure is presented. The variation of ΔR/R vs. pressure and ΔR/R vs. temperature as well as the sensitivity of the structure ΔW(RΔp) vs. temperature are analysed The sensing element show high linearity, absence of hysteresis, and good sensitivity, and can be used in high temperature applications
Keywords
chromium; gold; membranes; micromachining; microsensors; polymer films; pressure sensors; resistors; Au-Cr; GaAs; GaAs substrate; gold on chromium resistor; micromachining; polyimide membrane; pressure sensor; Biomembranes; Chromium; Gallium arsenide; Gold; Manufacturing processes; Micromachining; Polyimides; Pulp manufacturing; Resistors; Temperature sensors;
fLanguage
English
Publisher
ieee
Conference_Titel
Semiconductor Conference, 1999. CAS '99 Proceedings. 1999 International
Conference_Location
Sinaia
Print_ISBN
0-7803-5139-8
Type
conf
DOI
10.1109/SMICND.1999.810589
Filename
810589
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