Title :
Integral gauge pressure sensor with frequency output signal
Author :
Beshliu, V.S. ; Kantser, V.G. ; Beldiman, L.N. ; Beshliu, V.V. ; Coban, R.A.
Author_Institution :
Int. Lab. HTS SSE, Kishinev, Moldova
Abstract :
The process of manufacture of a silicon pressure-voltage sensor based on the bulk micromachining technology and voltage-frequency converter based on the CMOS technology is described. The electrical scheme and thermocompensation circuits of sensitivity and offset or the pressure-frequency sensor are presented. The structure, design, principle of operation and main characteristics of the gauge pressure sensor with the frequency output signal are considered
Keywords :
elemental semiconductors; micromachining; microsensors; pressure sensors; silicon; voltage-frequency convertors; CMOS technology; Si; bulk micromachining; electrical characteristics; frequency output signal; integral gauge pressure sensor; manufacture; pressure-frequency sensor; silicon pressure-voltage sensor; thermocompensation circuit; voltage-frequency converter; CMOS process; CMOS technology; Circuits; Frequency; Manufacturing processes; Micromachining; Sensor phenomena and characterization; Silicon; Thermal sensors; Voltage;
Conference_Titel :
Semiconductor Conference, 1999. CAS '99 Proceedings. 1999 International
Conference_Location :
Sinaia
Print_ISBN :
0-7803-5139-8
DOI :
10.1109/SMICND.1999.810592
