DocumentCode
3386187
Title
Integral gauge pressure sensor with frequency output signal
Author
Beshliu, V.S. ; Kantser, V.G. ; Beldiman, L.N. ; Beshliu, V.V. ; Coban, R.A.
Author_Institution
Int. Lab. HTS SSE, Kishinev, Moldova
Volume
2
fYear
1999
fDate
36434
Firstpage
491
Abstract
The process of manufacture of a silicon pressure-voltage sensor based on the bulk micromachining technology and voltage-frequency converter based on the CMOS technology is described. The electrical scheme and thermocompensation circuits of sensitivity and offset or the pressure-frequency sensor are presented. The structure, design, principle of operation and main characteristics of the gauge pressure sensor with the frequency output signal are considered
Keywords
elemental semiconductors; micromachining; microsensors; pressure sensors; silicon; voltage-frequency convertors; CMOS technology; Si; bulk micromachining; electrical characteristics; frequency output signal; integral gauge pressure sensor; manufacture; pressure-frequency sensor; silicon pressure-voltage sensor; thermocompensation circuit; voltage-frequency converter; CMOS process; CMOS technology; Circuits; Frequency; Manufacturing processes; Micromachining; Sensor phenomena and characterization; Silicon; Thermal sensors; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Semiconductor Conference, 1999. CAS '99 Proceedings. 1999 International
Conference_Location
Sinaia
Print_ISBN
0-7803-5139-8
Type
conf
DOI
10.1109/SMICND.1999.810592
Filename
810592
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