Title :
Structural and dimensional effects in electrical conductivity of SnO2 thin films used for gas sensors
Author :
Ivashchenko, Anatolii ; Kerner, Iacov
Author_Institution :
Inst. of Appl. Phys., Acad. of Sci., Kishinev, Moldova
Abstract :
Electrical conductivity in SnO2 thin films near 3D-2D transition is studied within the framework of percolation theory,. Four various approaches modeling film microstructure were used. The model of weekly textured polycrystal gives the best agreement between experimental and theoretical data
Keywords :
electrical conductivity; gas sensors; percolation; semiconductor materials; semiconductor thin films; tin compounds; 3D-2D transition; SnO2; SnO2 thin film; electrical conductivity; gas sensor; microstructure; percolation model; polycrystalline texture; Chemical sensors; Conducting materials; Conductive films; Conductivity; Gas detectors; Grain size; Physics; Semiconductor films; Thin film sensors; Transistors;
Conference_Titel :
Semiconductor Conference, 1999. CAS '99 Proceedings. 1999 International
Conference_Location :
Sinaia
Print_ISBN :
0-7803-5139-8
DOI :
10.1109/SMICND.1999.810594
