Title :
Dynamics of pulsed laser ablation for thin film growth
Author :
Geohegan, D.B. ; Puretzky, A.A.
Author_Institution :
Div. of Solid State, Oak Ridge Nat. Lab., TN, USA
Abstract :
Fast imaging and sensitive spectroscopic investigations of laser ablation plume propagation reveal fundamental collisional phenomena relevant to film growth by pulsed laser deposition and optimized cluster growth via laser vaporization. Two phenomena will be described. The first involves the splitting of the ablation plume into distinct high and low energy components as a weak shock front forms during ablation into a low-density background gas. The second involves the dynamics of graphite ablation for vacuum deposition of tetrahedrally coordinated amorphous diamond films.
Keywords :
amorphous state; diamond; plasma diagnostics; plasma production by laser; pulsed laser deposition; thin films; C; amorphous diamond films; cluster growth; graphite; laser ablation plume propagation; laser vaporization; pulsed laser ablation; tetrahedrally coordinated films; thin film; weak shock front; Amorphous materials; Gas lasers; Laser ablation; Optical films; Optical filters; Optical propagation; Optical pulses; Pulsed laser deposition; Spectroscopy; Transistors;
Conference_Titel :
Advanced Applications of Lasers in Materials Processing/Broadband Optical Networks/Smart Pixels/Optical MEMs and Their Applications. IEEE/LEOS 1996 Summer Topical Meetings:
Conference_Location :
Keystone, CO, USA
Print_ISBN :
0-7803-3175-3
DOI :
10.1109/LEOSST.1996.540658
