Dynamics of pulsed laser ablation for thin film growth

Author

Geohegan, D.B. ; Puretzky, A.A.

Author_Institution

Div. of Solid State, Oak Ridge Nat. Lab., TN, USA

fYear

1996

fDate

5-9 Aug. 1996

Firstpage

13

Lastpage

14

Abstract

Fast imaging and sensitive spectroscopic investigations of laser ablation plume propagation reveal fundamental collisional phenomena relevant to film growth by pulsed laser deposition and optimized cluster growth via laser vaporization. Two phenomena will be described. The first involves the splitting of the ablation plume into distinct high and low energy components as a weak shock front forms during ablation into a low-density background gas. The second involves the dynamics of graphite ablation for vacuum deposition of tetrahedrally coordinated amorphous diamond films.

Keywords

amorphous state; diamond; plasma diagnostics; plasma production by laser; pulsed laser deposition; thin films; C; amorphous diamond films; cluster growth; graphite; laser ablation plume propagation; laser vaporization; pulsed laser ablation; tetrahedrally coordinated films; thin film; weak shock front; Amorphous materials; Gas lasers; Laser ablation; Optical films; Optical filters; Optical propagation; Optical pulses; Pulsed laser deposition; Spectroscopy; Transistors;

fLanguage

English

Publisher

ieee

Conference_Titel

Advanced Applications of Lasers in Materials Processing/Broadband Optical Networks/Smart Pixels/Optical MEMs and Their Applications. IEEE/LEOS 1996 Summer Topical Meetings:

Conference_Location

Keystone, CO, USA

Print_ISBN

0-7803-3175-3

Type

conf

DOI

10.1109/LEOSST.1996.540658

Filename

540658