Title :
Modeling and design of a micromachined Fabry-Perot interferometer
Author :
Bostan, C.-G. ; Avraynescu, V.
Author_Institution :
Nat. Inst. for Res. & Dev. in Microtechnol., Bucharest
Abstract :
A physical model and its application to the design of a micromachined low-order tunable Fabry-Perot interferometer are discussed. The optical properties of the thin films as well as their surface defects are taken into account. The dependence of the free spectral range and the transmission bandwidth on the phase change which occurs on reflection are emphasized. A computer program written in MATLAB was applied to a particular structure
Keywords :
Fabry-Perot interferometers; micro-optics; micromachining; mirrors; optical design techniques; optical filters; optical transfer function; optical tuning; computer program; design; electrostatically varied gap spacing; free spectral range; intensity transfer function; low-order tunable interferometer; micromachined Fabry-Perot interferometer; multilayer mirrors; optical properties; phase change on reflection; physical model; single cavity; surface defects; thin films; transmission bandwidth; tunable high-finesse spectral filter; Fabry-Perot interferometers; Laser tuning; Optical films; Optical filters; Optical interferometry; Optical reflection; Optical refraction; Optical scattering; Optical sensors; Optical variables control;
Conference_Titel :
Semiconductor Conference, 1999. CAS '99 Proceedings. 1999 International
Conference_Location :
Sinaia
Print_ISBN :
0-7803-5139-8
DOI :
10.1109/SMICND.1999.810603
