Applications of fs lasers to nonlinear spectroscopy and process control of Si

Author

Dadap, Jerry I. ; Hu, X.F. ; Anderson, M.H. ; Beek, M.T. ; Aktsipetrov, O.A. ; Russell, N.M. ; Ekerdt, John G.

Author_Institution

Center for Synthesis, Growth & Anal. of Electron. Mater., Texas Univ., Austin, TX, USA

fYear

1996

fDate

5-9 Aug. 1996

Firstpage

43

Lastpage

44

Abstract

Si(O0 1) interfaces are among the most technologically important for nonlinear optical analysis, yet their exceptionally weak interfacial second harmonic susceptibility )I12)hsa s strongly inhibited quantitative interface-specific second harmonic (SH) spectroscopy and related nonlinear optical process control applications. The advent of widely tunable. unamplified femtosecond (fs) solid-state lasers has overcome this banier by enabling unprecedented SH generation efficiency (- lo6 photons/s) with minimal interface heating.

Keywords

Ge-Si alloys; MIS structures; adsorption; chromium; electro-optical effects; elemental semiconductors; modulation spectra; optical harmonic generation; semiconductor growth; semiconductor materials; silicon; silicon compounds; space charge; time resolved spectra; vapour phase epitaxial growth; 1 fs; H; Si-SiO/sub 2/-Cr; SiGe; UHV chemical vapor deposition; carrier dynamics; fs lasers; fs-time-resolved SH pump-probe study; hydrogen coverage; interface-specific second harmonic electro-modulation spectroscopy study; nonlinear spectroscopy; process control; real-time SH monitoring; space-charge region; Chemical technology; Harmonic analysis; Kinetic theory; Laser applications; Monitoring; Nonlinear optics; Process control; Resonance; Spectroscopy; Ultrafast optics;

fLanguage

English

Publisher

ieee

Conference_Titel

Advanced Applications of Lasers in Materials Processing/Broadband Optical Networks/Smart Pixels/Optical MEMs and Their Applications. IEEE/LEOS 1996 Summer Topical Meetings:

Conference_Location

Keystone, CO, USA

Print_ISBN

0-7803-3175-3

Type

conf

DOI

10.1109/LEOSST.1996.540670

Filename

540670