Gallium arsenide based micro-accelerometers

Author

Vu, T.T. ; Nguyen, P.C. ; Vu, L.T. ; Nguyen, C.H. ; Vu, J.N.C. ; Polla, D.L. ; Schiller, P.J. ; Stevanovich, S. ; Li, H.Y. ; Yang, Y.Q. ; Harjani, R.

Author_Institution

Top-Vu Technol. Inc., St. Paul, MN, USA

Volume

2

fYear

1997

fDate

3-6 Aug. 1997

Firstpage

1111

Abstract

Gallium arsenide (GaAs) based micro-accelerometers are being developed for guidance and navigation subsystems, and various microsensor systems. The micro-accelerometer is a microelectromechanical system (MEMS) micromachined on top of a GaAs substrate or GaAs integrated circuits. The MEMS accelerometer is integrated on the same chip as the GaAs readout circuit and the GaAs analog to digital converter. Test and prototype chips are developed.

Keywords

III-V semiconductors; accelerometers; ferroelectric thin films; gallium arsenide; integrated circuit technology; micromachining; microsensors; monolithic integrated circuits; piezoelectric transducers; sol-gel processing; GaAs; GaAs ADC; GaAs readout circuit; GaAs substrate; MEMS accelerometer; analog/digital converter; cantilever microbeam; microaccelerometers; microelectromechanical system; micromachined sensor; microsensor; Accelerometers; Circuits; Coatings; Gallium arsenide; Microelectromechanical systems; Micromechanical devices; Microsensors; Navigation; Piezoelectric materials; Sensor systems;

fLanguage

English

Publisher

ieee

Conference_Titel

Circuits and Systems, 1997. Proceedings of the 40th Midwest Symposium on

Print_ISBN

0-7803-3694-1

Type

conf

DOI

10.1109/MWSCAS.1997.662272

Filename

662272