Title :
High speed localized cooling using SiGe superlattice microrefrigerators
Author :
Zhang, Yan ; Christofferson, James ; Shakouri, Ali ; Zeng, Gehong ; Bowers, John E. ; Croke, Ed
Author_Institution :
Electr. Eng. Dept, California Univ., Santa Cruz, CA, USA
Abstract :
In this paper, thin film based SiGe superlattice microrefrigerators are fabricated and characterized in terms of maximum cooling, power density and transient response. The localized cooling and fast transient response, less than 40 μs, demonstrate the potential for hot spot cooling of optoelectronics, microprocessor and IC chips.
Keywords :
Ge-Si alloys; cooling; semiconductor materials; semiconductor superlattices; thermal management (packaging); thermoelectric devices; thin film devices; transient response; IC chip cooling; SiGe; high speed localized cooling; hot spot cooling; maximum cooling ability; microprocessor cooling; optoelectronics cooling; power density; thermoelectronic devices; thin film SiGe superlattice microrefrigerators; transient response; Cooling; Germanium silicon alloys; Heat sinks; Integrated circuit modeling; Microprocessors; Resistance heating; Silicon germanium; Superlattices; Temperature distribution; Thermoelectricity;
Conference_Titel :
Semiconductor Thermal Measurement and Management Symposium, 2003. Ninteenth Annual IEEE
Print_ISBN :
0-7803-7793-1
DOI :
10.1109/STHERM.2003.1194340
