Title :
Theoretical and experimental investigation on laser dry cleaning of particles from substrate surfaces
Author :
Song, W.D. ; Lu, Y.F. ; Hong, M.H. ; Chong, T.C. ; Low, T.S.
Author_Institution :
Dept. of Electr. Eng., Nat. Univ. of Singapore, Singapore
Abstract :
In order to develop laser cleaning technology to meet the need of industry, it is very important to investigate the cleaning efficiency and mechanism of this cleaning technology. Theoretical and experimental investigation on laser dry cleaning of particles from substrate surfaces is discussed in the paper.
Keywords :
laser materials processing; substrates; surface cleaning; surface contamination; cleaning efficiency; cleaning technology; laser cleaning technology; laser dry cleaning; particles; substrate surfaces; Cleaning; Laser beams; Laser theory; Laser transitions; Optical microscopy; Optical pulses; Potential energy; Scanning electron microscopy; Surface emitting lasers; Thermal expansion;
Conference_Titel :
Advanced Applications of Lasers in Materials Processing/Broadband Optical Networks/Smart Pixels/Optical MEMs and Their Applications. IEEE/LEOS 1996 Summer Topical Meetings:
Conference_Location :
Keystone, CO, USA
Print_ISBN :
0-7803-3175-3
DOI :
10.1109/LEOSST.1996.540682
