DocumentCode
3389749
Title
Theoretical and experimental investigation on laser dry cleaning of particles from substrate surfaces
Author
Song, W.D. ; Lu, Y.F. ; Hong, M.H. ; Chong, T.C. ; Low, T.S.
Author_Institution
Dept. of Electr. Eng., Nat. Univ. of Singapore, Singapore
fYear
1996
fDate
5-9 Aug. 1996
Firstpage
69
Lastpage
70
Abstract
In order to develop laser cleaning technology to meet the need of industry, it is very important to investigate the cleaning efficiency and mechanism of this cleaning technology. Theoretical and experimental investigation on laser dry cleaning of particles from substrate surfaces is discussed in the paper.
Keywords
laser materials processing; substrates; surface cleaning; surface contamination; cleaning efficiency; cleaning technology; laser cleaning technology; laser dry cleaning; particles; substrate surfaces; Cleaning; Laser beams; Laser theory; Laser transitions; Optical microscopy; Optical pulses; Potential energy; Scanning electron microscopy; Surface emitting lasers; Thermal expansion;
fLanguage
English
Publisher
ieee
Conference_Titel
Advanced Applications of Lasers in Materials Processing/Broadband Optical Networks/Smart Pixels/Optical MEMs and Their Applications. IEEE/LEOS 1996 Summer Topical Meetings:
Conference_Location
Keystone, CO, USA
Print_ISBN
0-7803-3175-3
Type
conf
DOI
10.1109/LEOSST.1996.540682
Filename
540682
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