DocumentCode
3390077
Title
Fabrication Of Physical Sensors
Author
Knutti, James W.
Author_Institution
IC Sensors Inc.
fYear
1990
fDate
1-4 Nov 1990
Firstpage
4
Lastpage
4
Keywords
Acceleration; Biosensors; Chemical and biological sensors; Chemical technology; Costs; Etching; Fabrication; Manufacturing; Seismic measurements; Silicon;
fLanguage
English
Publisher
ieee
Conference_Titel
Engineering in Medicine and Biology Society, 1990., Proceedings of the Twelfth Annual International Conference of the IEEE
Print_ISBN
0-87942-559-8
Type
conf
DOI
10.1109/IEMBS.1990.690917
Filename
690917
Link To Document