• DocumentCode
    3390148
  • Title

    Investigation into the performance of CNT-interconnects by spin coating technique

  • Author

    Wei-Chih Chiu ; Bing-Yue Tsui

  • Author_Institution
    Dept. of Electron. Eng., Nat. Chiao-Tung Univ., Hsinchu, Taiwan
  • fYear
    2013
  • fDate
    2-4 Jan. 2013
  • Firstpage
    240
  • Lastpage
    241
  • Abstract
    In this work, we proposed a simple fabrication process, spin coating and dry etching, to construct CNT-interconnects. The CNT-interconnects formed by the slow rate spin coating method have conductivity of more than 102 (S/cm) and the CNT-interconnects with 102 square numbers possess about 30% conductive probability. In addition, we inserted metal bridges into 1000-μm-long CNT-interconnects to effectively facilitate the performance.
  • Keywords
    carbon nanotubes; etching; interconnections; nanofabrication; spin coating; CNT-interconnects; conductive probability; dry etching; fabrication process; size 1000 mum; slow rate spin coating method; spin coating technique; Bridge circuits; Bridges; Coatings; Conductivity; Fabrication; Integrated circuit interconnections; Metals;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Nanoelectronics Conference (INEC), 2013 IEEE 5th International
  • Conference_Location
    Singapore
  • ISSN
    2159-3523
  • Print_ISBN
    978-1-4673-4840-9
  • Electronic_ISBN
    2159-3523
  • Type

    conf

  • DOI
    10.1109/INEC.2013.6466010
  • Filename
    6466010
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3390148