• DocumentCode
    3390152
  • Title

    A scheduling and resource optimising MES for the semiconductor and MEMS industry

  • Author

    Sieberg, Jürgen ; Walter, Ricco

  • Author_Institution
    ABAKUS Software GmbH, Dresden, Germany
  • fYear
    2003
  • fDate
    31 March-1 April 2003
  • Firstpage
    101
  • Lastpage
    105
  • Abstract
    While the number of custom specific products is increasing, the order size often diminishes. This problem leads to difficulties in managing demand changes, promising accurate dates and ensuring optimal equipment utilization. A real-time information gap exists in the heart of most manufacturing enterprises, since there is a lack of visibility and predictability. The scheduling of manufacturing orders bears great optimization potential. Based on modern MES with maximum equipment integration, the use of automatic process control and optimization enables SME to be more competitive, efficient and customer-friendly.
  • Keywords
    electronics industry; integrated circuit manufacture; manufacturing data processing; manufacturing resources planning; micromechanical devices; optimisation; process control; production control; production engineering computing; real-time systems; resource allocation; semiconductor device manufacture; MEMS industry; MES; Manufacturing Execution System; automatic process control; automatic process optimization; equipment integration; process dispatcher; process scheduler; recipe management; resource optimisation; semiconductor industry; Automatic control; Contamination; Control systems; Job shop scheduling; Manufacturing automation; Manufacturing processes; Micromechanical devices; Production; Robotics and automation; Semiconductor device manufacture;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Advanced Semiconductor Manufacturing Conference and Workshop, 2003 IEEEI/SEMI
  • ISSN
    1078-8743
  • Print_ISBN
    0-7803-7681-1
  • Type

    conf

  • DOI
    10.1109/ASMC.2003.1194476
  • Filename
    1194476