DocumentCode
3390152
Title
A scheduling and resource optimising MES for the semiconductor and MEMS industry
Author
Sieberg, Jürgen ; Walter, Ricco
Author_Institution
ABAKUS Software GmbH, Dresden, Germany
fYear
2003
fDate
31 March-1 April 2003
Firstpage
101
Lastpage
105
Abstract
While the number of custom specific products is increasing, the order size often diminishes. This problem leads to difficulties in managing demand changes, promising accurate dates and ensuring optimal equipment utilization. A real-time information gap exists in the heart of most manufacturing enterprises, since there is a lack of visibility and predictability. The scheduling of manufacturing orders bears great optimization potential. Based on modern MES with maximum equipment integration, the use of automatic process control and optimization enables SME to be more competitive, efficient and customer-friendly.
Keywords
electronics industry; integrated circuit manufacture; manufacturing data processing; manufacturing resources planning; micromechanical devices; optimisation; process control; production control; production engineering computing; real-time systems; resource allocation; semiconductor device manufacture; MEMS industry; MES; Manufacturing Execution System; automatic process control; automatic process optimization; equipment integration; process dispatcher; process scheduler; recipe management; resource optimisation; semiconductor industry; Automatic control; Contamination; Control systems; Job shop scheduling; Manufacturing automation; Manufacturing processes; Micromechanical devices; Production; Robotics and automation; Semiconductor device manufacture;
fLanguage
English
Publisher
ieee
Conference_Titel
Advanced Semiconductor Manufacturing Conference and Workshop, 2003 IEEEI/SEMI
ISSN
1078-8743
Print_ISBN
0-7803-7681-1
Type
conf
DOI
10.1109/ASMC.2003.1194476
Filename
1194476
Link To Document