Simulation-based evaluation of the ramp-up behavior of waferfabs

Author

Sturm, Roland ; Dorner, J. ; Reddig, Kevin ; Seidelmann, Joachim

Author_Institution

Dept. Cleanroom Manuf., Fraunhofer Inst. for Manuf. Eng. & Autom., Stuttgart, Germany

fYear

2003

fDate

31 March-1 April 2003

Firstpage

111

Lastpage

117

Abstract

In this paper we present a simulation study of wafer fab ramp-up scenarios with the simulation software AutoSched AP. A generic factory model (MIMAC 1 from Int. SEMATECH) was adapted to simulate fab ramp-up scenarios. The model was customized to consider time phased modeling capability and time phased reporting. Additionally, an evaluation approach for the comparison of different ramp-up simulation scenarios is presented. This approach helps to evaluate the ramp-up performance with different input parameters. A systematic variation of dispatch rules and lot sizes during ramp-up is shown.

Keywords

digital simulation; dispatching; industrial control; integrated circuit manufacture; production control; production engineering computing; AutoSched AP; IC manufacturing; MIMAC 1; dispatch rules; generic factory model; input parameters; lot sizes; simulation software; simulation-based evaluation; time phased modeling capability; time phased reporting; wafer fab ramp-up behavior; waferfabs; Capacity planning; Manufacturing automation; Predictive models; Production facilities; Production planning; Pulp manufacturing; Semiconductor device manufacture; Semiconductor device modeling; Steady-state; Virtual manufacturing;

fLanguage

English

Publisher

ieee

Conference_Titel

Advanced Semiconductor Manufacturing Conference and Workshop, 2003 IEEEI/SEMI

ISSN

1078-8743

Print_ISBN

0-7803-7681-1

Type

conf

DOI

10.1109/ASMC.2003.1194478

Filename

1194478